Recent Advances and New Trends in Nanotechnology and 3D Integration for Semiconductor Industry

JOURNAL ARTICLE published 16 March 2012 in ECS Transactions

Authors: John H. Lau

ULSI and Thin Film Semiconductor Technologies: Evolution of Industry and Research Linked to Higher Education in France

JOURNAL ARTICLE published 30 April 2019 in ECS Transactions

Authors: Olivier Bonnaud

Critical Components of FinFet Integration: Examining the Density Trade-off and Process Integration for FinFET Implementation

JOURNAL ARTICLE published 28 September 2007 in ECS Transactions

Authors: Rusty Harris | M. Hussain | Casey Smith | Ji-Woon Yang | J. Barnett | Barry Sassman | S. Song | B.H. Lee | Hsing Tseng | Raj Jammy

Three-Dimensional (3D) Integration Technology

JOURNAL ARTICLE published 21 March 2011 in ECS Transactions

Authors: Takayuki Ohba

(Invited) CMOS MEMS Integration

JOURNAL ARTICLE published 25 April 2011 in ECS Transactions

Authors: Gary K. Fedder

Integration of SiGe to MEMS applications

JOURNAL ARTICLE published 20 October 2006 in ECS Transactions

Authors: Manfred Reiche

(Invited) Near-Field Coupling Integration Technology

JOURNAL ARTICLE published 25 April 2016 in ECS Transactions

Authors: Tadahiro Kuroda

Integration Challenges and Opportunities of Nanoelectronic Devices

JOURNAL ARTICLE published 25 September 2009 in ECS Transactions

Authors: Yoshio Nishi

(Invited) 3D Integration in Silicon Technology

JOURNAL ARTICLE published 25 April 2011 in ECS Transactions

Authors: Mukta G. Farooq

Bio Inspired Architectures in the Nanoscale Integration Era

JOURNAL ARTICLE published 25 September 2009 in ECS Transactions

Authors: Tadashi Shibata

Introductory Remarks: Materials and Process Integration

JOURNAL ARTICLE published 28 April 2006 in ECS Transactions

Authors: S. Ikeda | M. Rodder

Mobility Enhancement and Strain Integration in Advanced CMOS

JOURNAL ARTICLE published 28 April 2006 in ECS Transactions

Authors: C. H. Diaz

High Volt Mixed Signal Integration Challenges

JOURNAL ARTICLE published 28 September 2007 in ECS Transactions

Authors: Matthew Tyler | John J. Naughton

CMOS Integration Issues with High-K/Metal Gate Stack

JOURNAL ARTICLE published 7 July 2006 in ECS Transactions

Authors: Dim-Lee Kwong

Physics and Integration of Fully-Depleted Silicon-On-Insulator Devices

JOURNAL ARTICLE published 27 April 2007 in ECS Transactions

Authors: Anne Vandooren

Salicide Integration Optimization for Improved Yield

JOURNAL ARTICLE published 28 September 2007 in ECS Transactions

Authors: Janet M. Towner | John J. Naughton

(Keynote) Heterogeneous Integration of MEMS by Adhesive Bonding

JOURNAL ARTICLE published 14 September 2015 in ECS Transactions

Authors: Masayoshi Esashi | Shuji Tanaka

(Invited) III-V / Si Integration for Photonics

JOURNAL ARTICLE published 4 May 2016 in ECS Transactions

Authors: Johann Peter Reithmaier | Mohamed Benyoucef

A Comparative Study and Analysis of Various Interconnects for Very Large-Scale Integration

JOURNAL ARTICLE published 1 September 2023 in ECS Advances

Authors: M. Susaritha

Monolithic Microphotonic Integration on the Silicon Platform

JOURNAL ARTICLE published 4 October 2011 in ECS Transactions

Authors: Lionel C. Kimerling | J. Michel